Small lot size lithography bays

小批量光刻台

Abstract

本发明提供了一种小批量光刻台。该小批量光刻台包括:(1)多个光刻工具;及(2)适于将小批量衬底载体传送到光刻工具的小批量传输系统。每个小批量衬底载体适于保持少于13块衬底。本发明还提供许多其他方面。
In a first aspect, a small lot size lithography bay is provided. The small lot size lithography bay includes (1) a plurality of lithography tools; and (2) a small lot size transport system adapted to transport small lot size substrate carriers to the lithography tools. Each small lot size substrate carrier is adapted to hold fewer than 13 substrates. Numerous other aspects are provided.

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