Small lot size lithography bays



In a first aspect, a small lot size lithography bay is provided. The small lot size lithography bay includes (1) a plurality of lithography tools; and (2) a small lot size transport system adapted to transport small lot size substrate carriers to the lithography tools. Each small lot size substrate carrier is adapted to hold fewer than 13 substrates. Numerous other aspects are provided.




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Patent Citations (6)

    Publication numberPublication dateAssigneeTitle
    CN-1499293-AMay 26, 2004Asml荷兰有限公司检验方法及器件制造方法
    US-5811211-ASeptember 22, 1998Nikon CorporationPeripheral edge exposure method
    US-6053688-AApril 25, 2000Cheng; DavidMethod and apparatus for loading and unloading wafers from a wafer carrier
    US-6431814-B1August 13, 2002Advanced Micro Devices, Inc.Integrated wafer stocker and sorter with integrity verification system
    US-6540466-B2April 01, 2003Applied Materials, Inc.Compact apparatus and method for storing and loading semiconductor wafer carriers
    US-6673638-B1January 06, 2004Kla-Tencor CorporationMethod and apparatus for the production of process sensitive lithographic features

NO-Patent Citations (1)


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    Publication numberPublication dateAssigneeTitle